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 Design, Construction, and Installation of Custom Vacuum Coating Systems
Sample Preparation, Laboratory Research and Proof of Concept
Sputtering:
Sputtering of pure metals and alloys
Reactive sputtering of metal oxides,
nitrides, and carbides
Co-sputtering (controllable deposition ratios
of two materials)
Evaporation:
Resistively heated sources Electron Beam Evaporation
Chemical Vapor
Deposition
Hot-filament
Pulsed DC -10-100KHz AC
Microwave excited
Ion
Beam
Plasma
treatment:
Pulsed DC 10-100KHz AC
Microwave excited
Ion Beam
Vacuum
Annealing:
Substrate heat and bias
Sol-Gel:
Aerogel layers
Densified metal-oxide layers
Patterning:
Ink Jet
Low-resolution Photolithography
Laser heating, curing, and ablation
Wet etching
Plasma etching
Ion Beam etching
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